Compositional and structural evolution of sputtered Ti-Al-N

Li Chen, Martin Moser, Yong Du, Paul Heinz Mayrhofer

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Translated title of the contributionCompositional and structural evolution of sputtered Ti-Al-N
Original languageEnglish
Pages (from-to)6635-6641
JournalThin solid films
Publication statusPublished - 2009

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