Translated title of the contribution | Compositional and structural evolution of sputtered Ti-Al-N |
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Original language | English |
Pages (from-to) | 6635-6641 |
Journal | Thin solid films |
Publication status | Published - 2009 |
Compositional and structural evolution of sputtered Ti-Al-N
Li Chen, Martin Moser, Yong Du, Paul Heinz Mayrhofer
Research output: Contribution to journal › Article › Research › peer-review
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