Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

Carsten J. Schubert, Volker Hoffmann, A. Kümmel, J. Sinn, Michael Härtel, A. Reuther, M. Thomalla, Thomas Gemming, Jürgen Eckert, Christoph Leyens

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2207-2212
Number of pages6
JournalJournal of analytical atomic spectrometry
Issue number11
Publication statusPublished - 6 Oct 2016

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