Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

Carsten J. Schubert; Volker Hoffmann; A. Kümmel; J. Sinn; Michael Härtel; A. Reuther; M. Thomalla; Thomas Gemming; Jürgen Eckert; Christoph Leyens

doi:10.1039/c6ja00251j

Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

Carsten J. Schubert, Volker Hoffmann, A. Kümmel, J. Sinn, Michael Härtel, A. Reuther, M. Thomalla, Thomas Gemming, Jürgen Eckert, Christoph Leyens

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

4 Citations (Scopus)

Original language	English
Pages (from-to)	2207-2212
Number of pages	6
Journal	Journal of analytical atomic spectrometry
Volume	31.2016
Issue number	11
DOIs	https://doi.org/10.1039/c6ja00251j
Publication status	Published - 6 Oct 2016

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10.1039/c6ja00251j

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title = "Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy",

author = "Schubert, {Carsten J.} and Volker Hoffmann and A. K{\"u}mmel and J. Sinn and Michael H{\"a}rtel and A. Reuther and M. Thomalla and Thomas Gemming and J{\"u}rgen Eckert and Christoph Leyens",

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AU - Schubert, Carsten J.

AU - Hoffmann, Volker

AU - Kümmel, A.

AU - Sinn, J.

AU - Härtel, Michael

AU - Reuther, A.

AU - Thomalla, M.

AU - Gemming, Thomas

AU - Eckert, Jürgen

AU - Leyens, Christoph

PY - 2016/10/6

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VL - 31.2016

SP - 2207

EP - 2212

JO - Journal of analytical atomic spectrometry

JF - Journal of analytical atomic spectrometry

IS - 11

ER -

Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

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