Compositional depth profiling of diamond-like carbon layers by glow discharge optical emission spectroscopy

  • Carsten J. Schubert
  • , Volker Hoffmann
  • , A. Kümmel
  • , J. Sinn
  • , Michael Härtel
  • , A. Reuther
  • , M. Thomalla
  • , Thomas Gemming
  • , Jürgen Eckert
  • , Christoph Leyens

Research output: Contribution to journalArticleResearchpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)2207-2212
Number of pages6
JournalJournal of analytical atomic spectrometry
Volume31.2016
Issue number11
DOIs
Publication statusPublished - 6 Oct 2016

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