Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics

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Translated title of the contribution	Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics
Original language	English
Title of host publication	Scanning Probe Microscopy in Nanoscience and Nanotechnology 2
Pages	691-721
DOIs	https://doi.org/10.1007/978-3-642-10497-8_23
Publication status	Published - 2011

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@inbook{fd465a50eb61437cb1465c09e48c2a0a,

title = "Conductive Atomic-Force Microscopy Investigation of Nanostructures in Microelectronics",

author = "Christian Teichert and Igor Beinik",

year = "2011",

doi = "10.1007/978-3-642-10497-8_23",

language = "English",

pages = "691--721",

booktitle = "Scanning Probe Microscopy in Nanoscience and Nanotechnology 2",

}