Conventional TEM investigation of the FIB damage in copper

Daniel Kiener, Thomas Jörg, Martin Rester, Christian Motz, Gerhard Dehm

Research output: Contribution to journal › Article › Research › peer-review

Translated title of the contribution	Conventional TEM investigation of the FIB damage in copper
Original language	English
Pages (from-to)	100-101
Journal	Microscopy and microanalysis
Volume	13
Publication status	Published - 2007

Cite this

@article{a1370f9f9b584e858a6b50d8460477d5,

title = "Conventional TEM investigation of the FIB damage in copper",

author = "Daniel Kiener and Thomas J{\"o}rg and Martin Rester and Christian Motz and Gerhard Dehm",

year = "2007",

language = "English",

volume = "13",

pages = "100--101",

journal = "Microscopy and microanalysis",

issn = "1431-9276",

publisher = "Cambridge University Press",

}