Conventional TEM Investigation of the FIB Damage in Copper

Daniel Kiener, Thomas Jörg, Martin Rester, Christian Motz, Gerhard Dehm

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionConventional TEM Investigation of the FIB Damage in Copper
Original languageEnglish
Title of host publicationMicroscopy Conference, International Forum for Advanced Microscopy
Pages100-101
Publication statusPublished - 2007

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