Conventional TEM Investigation of the FIB Damage in Copper

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	Conventional TEM Investigation of the FIB Damage in Copper
Original language	English
Title of host publication	Microscopy Conference, International Forum for Advanced Microscopy
Pages	100-101
Publication status	Published - 2007

Cite this

@inproceedings{7bb17192d11a4904b5ad1ff05b68f4c6,

title = "Conventional TEM Investigation of the FIB Damage in Copper",

author = "Daniel Kiener and Thomas J{\"o}rg and Martin Rester and Christian Motz and Gerhard Dehm",

year = "2007",

language = "English",

pages = "100--101",

booktitle = "Microscopy Conference, International Forum for Advanced Microscopy",

}