Conventional TEM investigation of the FIB damage in copper

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Translated title of the contribution	Conventional TEM investigation of the FIB damage in copper
Original language	English
Pages (from-to)	100-101
Journal	Microscopy and microanalysis
Volume	13
Publication status	Published - 2007

Cite this

@article{a1370f9f9b584e858a6b50d8460477d5,

title = "Conventional TEM investigation of the FIB damage in copper",

author = "Daniel Kiener and Thomas J{\"o}rg and Martin Rester and Christian Motz and Gerhard Dehm",

year = "2007",

language = "English",

volume = "13",

pages = "100--101",

journal = "Microscopy and microanalysis",

issn = "1431-9276",

publisher = "Oxford University Press, Gro{\ss}britannien",

}