Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher; Francisca Mendez Martin; B. Sartory; Nina Schalk; Jozef Keckes; J. Lu; L. Hultman; Christian Mitterer

doi:10.1016/j.tsf2014.11.084

Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher, Francisca Mendez Martin, B. Sartory, Nina Schalk, Jozef Keckes, J. Lu, L. Hultman, Christian Mitterer

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

10 Citations (Scopus)

Translated title of the contribution	Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Original language	English
Pages (from-to)	103-109
Journal	Thin solid films
Volume	574
DOIs	https://doi.org/10.1016/j.tsf2014.11.084
Publication status	Published - 2015

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10.1016/j.tsf2014.11.084

Cite this

@article{c95ea5d22b1241fba346e985247def40,

title = "Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and B. Sartory and Nina Schalk and Jozef Keckes and J. Lu and L. Hultman and Christian Mitterer",

year = "2015",

doi = "10.1016/j.tsf2014.11.084",

language = "English",

volume = "574",

pages = "103--109",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier",

}

TY - JOUR

T1 - Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Lu, J.

AU - Hultman, L.

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

U2 - 10.1016/j.tsf2014.11.084

DO - 10.1016/j.tsf2014.11.084

M3 - Article

SN - 0040-6090

VL - 574

SP - 103

EP - 109

JO - Thin solid films

JF - Thin solid films

ER -