Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher; Francisca Mendez Martin; B. Sartory; Nina Schalk; Jozef Keckes; J. Lu; L. Hultman; Christian Mitterer

doi:10.1016/j.tsf2014.11.084

Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher
, Francisca Mendez Martin
, B. Sartory
, Nina Schalk
, Jozef Keckes
, J. Lu
, L. Hultman
, Christian Mitterer

Chair of Materials Physics (430)

Research output: Contribution to journal › Article › Research › peer-review

10 Citations (Scopus)

Translated title of the contribution	Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography
Original language	English
Pages (from-to)	103-109
Journal	Thin solid films
Volume	574
DOIs	https://doi.org/10.1016/j.tsf2014.11.084
Publication status	Published - 2015

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10.1016/j.tsf2014.11.084

Cite this

@article{c95ea5d22b1241fba346e985247def40,

title = "Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and \{Mendez Martin\}, Francisca and B. Sartory and Nina Schalk and Jozef Keckes and J. Lu and L. Hultman and Christian Mitterer",

year = "2015",

doi = "10.1016/j.tsf2014.11.084",

language = "English",

volume = "574",

pages = "103--109",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Copper diffusion into single-crystalline TiN studied by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, B.

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Lu, J.

AU - Hultman, L.

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

U2 - 10.1016/j.tsf2014.11.084

DO - 10.1016/j.tsf2014.11.084

M3 - Article

SN - 0040-6090

VL - 574

SP - 103

EP - 109

JO - Thin solid films

JF - Thin solid films

ER -