Correlative microstructure and topography informed nanoindentation of copper films

Stephan Bigl, Thomas Schöberl, Stefan Wurster, Megan Cordill, Daniel Kiener

Research output: Contribution to journalArticleResearchpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)404-413
Number of pages10
JournalSurface & coatings technology
Volume308.2016
Issue number25 December
DOIs
Publication statusPublished - 25 Dec 2016

Keywords

  • Contact mechanics
  • Copper metallization
  • Grain boundaries
  • Local mechanical behaviour
  • Nanoindentation

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