Data based modelling and identification of nonlinear SDOF MOEMS mirror

David Brunner, Han Woong Yoo, Thomas Thurner, Georg Schitter

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Publication statusPublished - 2019
Externally publishedYes
EventMOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States
Duration: 2 Feb 20194 Feb 2019


ConferenceMOEMS and Miniaturized Systems XVIII 2019
Country/TerritoryUnited States
CitySan Francisco

Bibliographical note

Publisher Copyright:
© 2019 SPIE.


  • Actuated decay
  • Comb-drive torque
  • Data based identification
  • Generalized nonlinear SDOF model
  • Micro-Opto-Electro-Mechanical System (MOEMS)
  • Resonant scanning mirror

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