Data based modelling and identification of nonlinear SDOF MOEMS mirror

David Brunner; Han Woong Yoo; Thomas Thurner; Georg Schitter

doi:10.1117/12.2508429

Data based modelling and identification of nonlinear SDOF MOEMS mirror

David Brunner
, Han Woong Yoo
, Thomas Thurner
, Georg Schitter

Infineon Technologies Austria AG, Graz
Institute of Materials Science and Technology

Research output: Contribution to conference › Paper › peer-review

Original language	English
DOIs	https://doi.org/10.1117/12.2508429
Publication status	Published - 2019
Externally published	Yes
Event	MOEMS and Miniaturized Systems XVIII 2019 - San Francisco, United States Duration: 2 Feb 2019 → 4 Feb 2019

Conference

Conference	MOEMS and Miniaturized Systems XVIII 2019
Country/Territory	United States
City	San Francisco
Period	2/02/19 → 4/02/19

Bibliographical note

Publisher Copyright:
© 2019 SPIE.

Keywords

Actuated decay
Comb-drive torque
Data based identification
Generalized nonlinear SDOF model
Micro-Opto-Electro-Mechanical System (MOEMS)
Resonant scanning mirror

Access to Document

10.1117/12.2508429

Cite this

@conference{c7ab09ea0c554fbc97df5821e26b70c9,

title = "Data based modelling and identification of nonlinear SDOF MOEMS mirror",

keywords = "Actuated decay, Comb-drive torque, Data based identification, Generalized nonlinear SDOF model, Micro-Opto-Electro-Mechanical System (MOEMS), Resonant scanning mirror",

author = "David Brunner and Yoo, \{Han Woong\} and Thomas Thurner and Georg Schitter",

note = "Publisher Copyright: {\textcopyright} 2019 SPIE.; MOEMS and Miniaturized Systems XVIII 2019 ; Conference date: 02-02-2019 Through 04-02-2019",

year = "2019",

doi = "10.1117/12.2508429",

language = "English",

}

TY - CONF

T1 - Data based modelling and identification of nonlinear SDOF MOEMS mirror

AU - Brunner, David

AU - Yoo, Han Woong

AU - Thurner, Thomas

AU - Schitter, Georg

PY - 2019

Y1 - 2019

KW - Actuated decay

KW - Comb-drive torque

KW - Data based identification

KW - Generalized nonlinear SDOF model

KW - Micro-Opto-Electro-Mechanical System (MOEMS)

KW - Resonant scanning mirror

UR - https://www.scopus.com/pages/publications/85068070473

U2 - 10.1117/12.2508429

DO - 10.1117/12.2508429

M3 - Paper

AN - SCOPUS:85068070473

T2 - MOEMS and Miniaturized Systems XVIII 2019

Y2 - 2 February 2019 through 4 February 2019

ER -

Data based modelling and identification of nonlinear SDOF MOEMS mirror

Conference

Bibliographical note

Keywords

Access to Document

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Cite this