Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy

Thomas Prohaska, M. Ritala, M. Leskelä, L. Niinistö, G FRIEDBACHER, M GRASSERBAUER

Research output: Contribution to journalArticleResearchpeer-review

187 Citations (Scopus)
Original languageEnglish
Pages (from-to)72-80
JournalThin solid films
Publication statusPublished - 1994

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