Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy

M. Ritala, M. Leskelä, L. Niinistö, Thomas Prohaska, Gernot Friedbacher, Manfred Grasserbauer

Research output: Contribution to journal › Article › Research › peer-review

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Cite this

@article{926d20691c9a4b1ca508085240ef457d,

title = "Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy",

author = "M. Ritala and M. Leskel{\"a} and L. Niinist{\"o} and Thomas Prohaska and Gernot Friedbacher and Manfred Grasserbauer",

year = "1994",

language = "English",

volume = "250.1994",

pages = "72--80",

journal = "Thin solid films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Development of crystallinity and morphology in hafnium dioxide thin films grown by Atomic Layer Epitaxy

AU - Ritala, M.

AU - Leskelä, M.

AU - Niinistö, L.

AU - Prohaska, Thomas

AU - Friedbacher, Gernot

AU - Grasserbauer, Manfred

PY - 1994

Y1 - 1994

M3 - Article

SN - 0040-6090

VL - 250.1994

SP - 72

EP - 80

JO - Thin solid films

JF - Thin solid films

ER -