Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

Markus Nuspl; J. Angeli; W. Posch; Wolfhard Wegscheider

Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

Markus Nuspl, J. Angeli, W. Posch, Wolfhard Wegscheider

Chair of General and Analytical Chemistry (120)

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database
Original language	English
Title of host publication	Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database
Pages	1-11
Publication status	Published - 2004

Cite this

@inproceedings{a734f5c8e68e4147abd544e18617160a,

title = "Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database",

author = "Markus Nuspl and J. Angeli and W. Posch and Wolfhard Wegscheider",

year = "2004",

language = "English",

pages = "1--11",

booktitle = "Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database",

}

Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database. / Nuspl, Markus; Angeli, J.; Posch, W. et al.
Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database. 2004. p. 1-11.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

AU - Nuspl, Markus

AU - Angeli, J.

AU - Posch, W.

AU - Wegscheider, Wolfhard

PY - 2004

Y1 - 2004

M3 - Conference contribution

SP - 1

EP - 11

BT - Developments in offline evaluation of cleanliness measurements with automated SEM-EDX technique used for generation of an inclusion database

ER -