Diffusion Studies in the TiN/Cu Bilayer System and Beyond

Marlene Mühlbacher; Francisca Mendez Martin; Bernhard  Sartory; Grzegorz Greczynski; Jun Lu; Nina Schalk; Lars Hultman; Christian Mitterer

Diffusion Studies in the TiN/Cu Bilayer System and Beyond

Marlene Mühlbacher, Francisca Mendez Martin, Bernhard Sartory, Grzegorz Greczynski, Jun Lu, Nina Schalk, Lars Hultman, Christian Mitterer

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2016
Event	43rd International Conference on Metallurgical Coatings and Thin Films 2016 - San Diego, United States Duration: 25 Apr 2016 → 29 Apr 2016

Conference

Conference	43rd International Conference on Metallurgical Coatings and Thin Films 2016
Country/Territory	United States
City	San Diego
Period	25/04/16 → 29/04/16

43rd International Conference on Metallurgical Coatings and Thin Films 2016
Mühlbacher, M. (Speaker)
27 Apr 2016
Activity: Participating in or organising an event › Participation in conference

Cite this

@conference{25eb8abb6a5f4a008b37f600ce29a901,

title = "Diffusion Studies in the TiN/Cu Bilayer System and Beyond",

author = "Marlene M{\"u}hlbacher and {Mendez Martin}, Francisca and Bernhard Sartory and Grzegorz Greczynski and Jun Lu and Nina Schalk and Lars Hultman and Christian Mitterer",

year = "2016",

language = "English",

note = "43rd International Conference on Metallurgical Coatings and Thin Films 2016 ; Conference date: 25-04-2016 Through 29-04-2016",

}

TY - CONF

T1 - Diffusion Studies in the TiN/Cu Bilayer System and Beyond

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Greczynski, Grzegorz

AU - Lu, Jun

AU - Schalk, Nina

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2016

Y1 - 2016

M3 - Presentation

T2 - 43rd International Conference on Metallurgical Coatings and Thin Films 2016

Y2 - 25 April 2016 through 29 April 2016

ER -

Diffusion Studies in the TiN/Cu Bilayer System and Beyond

Conference

Activities

43rd International Conference on Metallurgical Coatings and Thin Films 2016

Cite this