Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

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1 Citation (Scopus)
42 Downloads (Pure)
Original languageEnglish
Article number110306
JournalMaterials and Design
Volume213
DOIs
Publication statusPublished - 2022

Bibliographical note

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© 2021 The Authors

Keywords

  • Biaxial strength
  • Brittle single crystals
  • Hardness anisotropy
  • Reliability of microelectronic materials
  • Scratch testing
  • Strength anisotropy

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