Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Research output: Contribution to journalArticleResearchpeer-review

1 Citation (Scopus)
42 Downloads (Pure)
Original languageEnglish
Article number110306
JournalMaterials and Design
Publication statusPublished - 2022

Bibliographical note

Publisher Copyright:
© 2021 The Authors


  • Biaxial strength
  • Brittle single crystals
  • Hardness anisotropy
  • Reliability of microelectronic materials
  • Scratch testing
  • Strength anisotropy

Cite this