Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Manuel Gruber; Alexander Leitner; Daniel Kiener; Peter Supancic; Raul Bermejo

doi:https://doi.org/10.1016/j.matdes.2021.110306

Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Manuel Gruber, Alexander Leitner, Daniel Kiener, Peter Supancic, Raul Bermejo

Research output: Contribution to journal › Article › Research › peer-review

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Original language	English
Article number	110306
Journal	Materials and Design
Volume	213
DOIs	https://doi.org/10.1016/j.matdes.2021.110306 https://doi.org/10.1016/j.matdes.2021.110306
Publication status	Published - 2022

Bibliographical note

Publisher Copyright:
© 2021 The Authors

Keywords

Biaxial strength
Brittle single crystals
Hardness anisotropy
Reliability of microelectronic materials
Scratch testing
Strength anisotropy

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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M. Gruber, A. Leitner, D. Kiener, S. Supancic, R. Bermejo 2022 (Mater Design 213,110306)Final published version, 2.18 MBLicence: CC BY-NC-ND

Cite this

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title = "Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications",

keywords = "Biaxial strength, Brittle single crystals, Hardness anisotropy, Reliability of microelectronic materials, Scratch testing, Strength anisotropy",

author = "Manuel Gruber and Alexander Leitner and Daniel Kiener and Peter Supancic and Raul Bermejo",

note = "Publisher Copyright: {\textcopyright} 2021 The Authors",

year = "2022",

doi = "https://doi.org/10.1016/j.matdes.2021.110306",

language = "English",

volume = "213",

journal = "Materials and Design",

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TY - JOUR

T1 - Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

AU - Gruber, Manuel

AU - Leitner, Alexander

AU - Kiener, Daniel

AU - Supancic, Peter

AU - Bermejo, Raul

PY - 2022

Y1 - 2022

KW - Biaxial strength

KW - Brittle single crystals

KW - Hardness anisotropy

KW - Reliability of microelectronic materials

KW - Scratch testing

KW - Strength anisotropy

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U2 - https://doi.org/10.1016/j.matdes.2021.110306

DO - https://doi.org/10.1016/j.matdes.2021.110306

M3 - Article

AN - SCOPUS:85120697868

SN - 0264-1275

VL - 213

JO - Materials and Design

JF - Materials and Design

M1 - 110306

ER -

Effect of crystal orientation on the hardness and strength of piezoelectric LiNbO3 substrates for microelectronic applications

Bibliographical note

Keywords

UN SDGs

Access to Document

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