Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

Research output: Contribution to journal › Article › Research › peer-review

10 Citations (Scopus)

Original language	English
Article number	041517
Number of pages	8
Journal	Journal of vacuum science & technology / A (JVST)
Volume	34.2016
Issue number	4
DOIs	https://doi.org/10.1116/1.4954949
Publication status	Published - 1 Jul 2016

Access to Document

@article{efe8d011d39f48a0a82ba94e3c7c7da2,

title = "Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN",

author = "Christian Saringer and Robert Franz and Katrin Zorn and Christian Mitterer",

year = "2016",

month = jul,

day = "1",

doi = "10.1116/1.4954949",

language = "English",

volume = "34.2016",

journal = "Journal of vacuum science & technology / A (JVST)",

issn = "0734-2101",

publisher = "AVS Science and Technology Society",

number = "4",

}

TY - JOUR

T1 - Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiN

AU - Saringer, Christian

AU - Franz, Robert

AU - Zorn, Katrin

AU - Mitterer, Christian

PY - 2016/7/1

Y1 - 2016/7/1

UR - http://scitation.aip.org/content/avs/journal/jvsta/34/4/10.1116/1.4954949

U2 - 10.1116/1.4954949

DO - 10.1116/1.4954949

M3 - Article

SN - 0734-2101

VL - 34.2016

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

IS - 4

M1 - 041517

ER -