Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionEffect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films
Original languageEnglish
Title of host publicationProceedings 37th International Conference on Metallurgical Coatings and Thin Films
Pages63-63
Publication statusPublished - 2010

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