Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Translated title of the contribution	Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films
Original language	English
Title of host publication	Proceedings 37th International Conference on Metallurgical Coatings and Thin Films
Pages	63-63
Publication status	Published - 2010

Cite this

@inproceedings{374db112fb3e4ea5a502297cc435f05d,

title = "Effect of Grain Size on the Residual Stress State and Thermal Expansion in Magnetron Sputtered Thin Films",

author = "Rostislav Daniel and David Holec and Jozef Keckes and Christian Mitterer",

year = "2010",

language = "English",

pages = "63--63",

booktitle = "Proceedings 37th International Conference on Metallurgical Coatings and Thin Films",

}