Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

Imane Souli, Velislava Terziyska, Jozef Keckes, Werner Robl, Johannes Zechner, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

5 Citations (Scopus)
Original languageEnglish
Article number022201
Number of pages11
JournalJournal of vacuum science & technology / B (JVST)
Issue number2
Publication statusPublished - 9 Feb 2017

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