Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

Imane Souli; Velislava Terziyska; Jozef Keckes; Werner Robl; Johannes Zechner; Christian Mitterer

doi:10.1116/1.4975805

Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

Imane Souli, Velislava Terziyska, Jozef Keckes, Werner Robl, Johannes Zechner, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

5 Citations (Scopus)

Original language	English
Article number	022201
Number of pages	11
Journal	Journal of vacuum science & technology / B (JVST)
Volume	35.2017
Issue number	2
DOIs	https://doi.org/10.1116/1.4975805
Publication status	Published - 9 Feb 2017

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10.1116/1.4975805

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@article{4d888197264c4fe899b2576e0c8a95a3,

title = "Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers",

author = "Imane Souli and Velislava Terziyska and Jozef Keckes and Werner Robl and Johannes Zechner and Christian Mitterer",

year = "2017",

month = feb,

day = "9",

doi = "10.1116/1.4975805",

language = "English",

volume = "35.2017",

journal = "Journal of vacuum science & technology / B (JVST)",

issn = "1071-1023",

publisher = "American Institute of Physics",

number = "2",

}

Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers. / Souli, Imane; Terziyska, Velislava ; Keckes, Jozef et al.
In: Journal of vacuum science & technology / B (JVST), Vol. 35.2017, No. 2, 022201, 09.02.2017.

Research output: Contribution to journal › Article › Research › peer-review

TY - JOUR

T1 - Effect of growth conditions on interface stability and thermophysical properties of sputtered Cu films on Si with and without WTi barrier layers

AU - Souli, Imane

AU - Terziyska, Velislava

AU - Keckes, Jozef

AU - Robl, Werner

AU - Zechner, Johannes

AU - Mitterer, Christian

PY - 2017/2/9

Y1 - 2017/2/9

U2 - 10.1116/1.4975805

DO - 10.1116/1.4975805

M3 - Article

SN - 1071-1023

VL - 35.2017

JO - Journal of vacuum science & technology / B (JVST)

JF - Journal of vacuum science & technology / B (JVST)

IS - 2

M1 - 022201

ER -