Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films

Imane Souli, Christian Mitterer

Research output: Contribution to conferencePosterResearchpeer-review

Original languageEnglish
Publication statusPublished - 2015
EventCampeon Innovation Week 2015 - München, Germany
Duration: 12 Nov 201513 Nov 2015

Workshop

WorkshopCampeon Innovation Week 2015
Country/TerritoryGermany
CityMünchen
Period12/11/1513/11/15

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