Effect of growth conditions on stress, texture, roughness and self-annealing behavior of sputter deposited Cu films

Research output: Contribution to conference › Poster › Research › peer-review

Original languageEnglish
Publication statusPublished - 2015
EventCampeon Innovation Week 2015 - München, Germany
Duration: 12 Nov 2015 → 13 Nov 2015

Workshop

WorkshopCampeon Innovation Week 2015
Country/TerritoryGermany
CityMünchen
Period12/11/15 → 13/11/15

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