Effects of thermal annealing on the microstructure of sputtered Al 2O3 coatings

V. Edlmayr, T. P. Harzer, R. Hoffmann, D. Kiener, C. Scheu, C. Mitterer

Research output: Contribution to journalArticleResearchpeer-review

25 Citations (Scopus)
Original languageEnglish
Article number041506
JournalJournal of vacuum science & technology / A (JVST)
Volume29
Issue number4
DOIs
Publication statusPublished - Jul 2011

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