Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Robert Franz; Peter Polcik; André Anders

doi:10.1016/j.surfcoat.2015.03.047

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Robert Franz, Peter Polcik, André Anders

Chair of Functional Materials and Materials Systems (425)

Research output: Contribution to journal › Article › Research › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	309-321
Journal	Surface & coatings technology
Volume	272
DOIs	https://doi.org/10.1016/j.surfcoat.2015.03.047
Publication status	Published - 2015

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10.1016/j.surfcoat.2015.03.047

Cite this

@article{86bac0827ded445fb36a14f636c8d167,

title = "Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres",

author = "Robert Franz and Peter Polcik and Andr{\'e} Anders",

year = "2015",

doi = "10.1016/j.surfcoat.2015.03.047",

language = "English",

volume = "272",

pages = "309--321",

journal = "Surface & coatings technology",

issn = "0257-8972",

publisher = "Elsevier",

}

TY - JOUR

T1 - Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, André

PY - 2015

Y1 - 2015

U2 - 10.1016/j.surfcoat.2015.03.047

DO - 10.1016/j.surfcoat.2015.03.047

M3 - Article

SN - 0257-8972

VL - 272

SP - 309

EP - 321

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -