Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Robert Franz; Peter Polcik; André Anders

doi:10.1016/j.surfcoat.2015.03.047

Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Robert Franz
, Peter Polcik
, André Anders

Chair of Functional Materials and Materials Systems (425)

Plansee Composite Materials GmbH
Lawrence Berkeley National Laboratory

Research output: Contribution to journal › Article › Research › peer-review

8 Citations (Scopus)

Original language	English
Pages (from-to)	309-321
Journal	Surface & coatings technology
Volume	272
DOIs	https://doi.org/10.1016/j.surfcoat.2015.03.047
Publication status	Published - 2015

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10.1016/j.surfcoat.2015.03.047

Cite this

@article{86bac0827ded445fb36a14f636c8d167,

title = "Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres",

author = "Robert Franz and Peter Polcik and Andr{\'e} Anders",

year = "2015",

doi = "10.1016/j.surfcoat.2015.03.047",

language = "English",

volume = "272",

pages = "309--321",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

AU - Franz, Robert

AU - Polcik, Peter

AU - Anders, André

PY - 2015

Y1 - 2015

U2 - 10.1016/j.surfcoat.2015.03.047

DO - 10.1016/j.surfcoat.2015.03.047

M3 - Article

SN - 0257-8972

VL - 272

SP - 309

EP - 321

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -