Enhanced Ti0.84Ta0.16N diffusion barriers, grown by a hybrid sputtering technique with no substrate heating, between Si (001) wafers and Cu overlayers

Marlene Mühlbacher, Grzegorz Greczynski, Bernhard Sartory, Nina Schalk, Jun Lu, Ivan Petrov, J.E. Greene, Lars Hultman, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

17 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
JournalScientific reports (London : Nature Publishing Group)
Publication statusPublished - 2018

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