Original languageEnglish
Article number113724
JournalVacuum
Volume230
DOIs
Publication statusPublished - Dec 2024

Bibliographical note

Publisher Copyright:
© 2024 The Authors

Keywords

  • Low energy ion scattering spectroscopy
  • Magnetron sputter inert gas condensation
  • Magnetron sputtering
  • Nanoparticle synthesis
  • Thin film

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