Entwicklung und Simulation einer "Run to Run" Regelungsschleife für Ofenprozesse in der Halbleiterindustrie

Translated title of the contribution: Development and simulation of a run to run controller for semiconductor furnace processes

Christian Thomas Fischer

Research output: Thesis › Master's Thesis (University Course) › peer-review

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Translated title of the contribution	Development and simulation of a run to run controller for semiconductor furnace processes
Original language	German
Qualification	Dipl.-Ing.
Awarding Institution	Montanuniversität
Supervisors/Advisors	Kepplinger, Werner Leopold, Supervisor (internal) Sorschag, Kurt, Supervisor (external), External person
Publication status	Published - 25 Nov 2004

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@phdthesis{d9121351ab9f4d509b5fb135b4b18640,

title = "Entwicklung und Simulation einer {"}Run to Run{"} Regelungsschleife f{\"u}r Ofenprozesse in der Halbleiterindustrie",

author = "Fischer, {Christian Thomas}",

year = "2004",

month = nov,

day = "25",

language = "Deutsch",

type = "Master's Thesis (University Course)",

school = "Montanuniversit{\"a}t Leoben (000)",

}