Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

Robert Franz, Francisca Mendez Martin, Gerhard Hawranek, Peter Polcik

Research output: Contribution to journal › Article › Research › peer-review

13 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of vacuum science & technology / A (JVST)
Volume	Vol. 34
Issue number	No. 2
DOIs	https://doi.org/10.1116/1.4941409
Publication status	Published - 2016

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title = "Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres",

author = "Robert Franz and {Mendez Martin}, Francisca and Gerhard Hawranek and Peter Polcik",

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T1 - Erosion behavior of composite Al-Cr cathodes in cathodic arc plasmas in inert and reactive atmospheres

AU - Franz, Robert

AU - Mendez Martin, Francisca

AU - Hawranek, Gerhard

AU - Polcik, Peter

PY - 2016

Y1 - 2016

U2 - http://dx.doi.org/10.1116/1.4941409

DO - http://dx.doi.org/10.1116/1.4941409

M3 - Article

SN - 0734-2101

VL - Vol. 34

SP - 1

EP - 8

JO - Journal of vacuum science & technology / A (JVST)

JF - Journal of vacuum science & technology / A (JVST)

IS - No. 2

ER -