Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher; Francisca Mendez Martin; Bernhard  Sartory; Livia Chitu; Jun Lu; Nina Schalk; Jozef Keckes; Lars Hultman; Christian Mitterer

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher
, Francisca Mendez Martin
, Bernhard Sartory
, Livia Chitu
, Jun Lu
, Nina Schalk
, Jozef Keckes
, Lars Hultman
, Christian Mitterer

Erich Schmid Institute of Materials Science
Materials Center Leoben Forschungs GmbH
Linköping University

Research output: Contribution to conference › Presentation › Research › peer-review

Original language	English
Publication status	Published - 2015
Event	42nd International Conference on Metallurgical Coatings and Thin Films - San Diego, United States Duration: 20 Apr 2015 → 24 Apr 2015 https://www2.avs.org/conferences/icmctf/

Conference

Conference	42nd International Conference on Metallurgical Coatings and Thin Films
Abbreviated title	ICMCTF 2015
Country/Territory	United States
City	San Diego
Period	20/04/15 → 24/04/15
Internet address	https://www2.avs.org/conferences/icmctf/

42nd International Conference on Metallurgical Coatings and Thin Films
Mühlbacher, M. (Speaker)
24 Apr 2015
Activity: Participating in or organising an event › Participation in conference

Cite this

Mühlbacher, M., Mendez Martin, F., Sartory, B., Chitu, L., Lu, J., Schalk, N., Keckes, J., Hultman, L., & Mitterer, C. (2015). Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.

@conference{928c76d9abd744939265f08465f59245,

title = "Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography",

author = "Marlene M{\"u}hlbacher and \{Mendez Martin\}, Francisca and Bernhard Sartory and Livia Chitu and Jun Lu and Nina Schalk and Jozef Keckes and Lars Hultman and Christian Mitterer",

year = "2015",

language = "English",

note = "42nd International Conference on Metallurgical Coatings and Thin Films , ICMCTF 2015 ; Conference date: 20-04-2015 Through 24-04-2015",

url = "https://www2.avs.org/conferences/icmctf/",

}

Mühlbacher, M, Mendez Martin, F, Sartory, B, Chitu, L, Lu, J, Schalk, N , Keckes, J, Hultman, L & Mitterer, C 2015, 'Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography', 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, United States, 20/04/15 - 24/04/15.

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography. / Mühlbacher, Marlene; Mendez Martin, Francisca; Sartory, Bernhard et al.
2015. 42nd International Conference on Metallurgical Coatings and Thin Films , San Diego, California, United States.

Research output: Contribution to conference › Presentation › Research › peer-review

TY - CONF

T1 - Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

AU - Mühlbacher, Marlene

AU - Mendez Martin, Francisca

AU - Sartory, Bernhard

AU - Chitu, Livia

AU - Lu, Jun

AU - Schalk, Nina

AU - Keckes, Jozef

AU - Hultman, Lars

AU - Mitterer, Christian

PY - 2015

Y1 - 2015

M3 - Presentation

T2 - 42nd International Conference on Metallurgical Coatings and Thin Films

Y2 - 20 April 2015 through 24 April 2015

ER -

Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Conference

Activities

42nd International Conference on Metallurgical Coatings and Thin Films

Cite this