Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher
, Francisca Mendez Martin
, Bernhard Sartory
, Livia Chitu
, Jun Lu
, Nina Schalk
, Jozef Keckes
, Lars Hultman
, Christian Mitterer

Erich Schmid Institute of Materials Science
Materials Center Leoben Forschungs GmbH
Linköping University

Research output: Contribution to conference › Presentation › Research › peer-review

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42nd International Conference on Metallurgical Coatings and Thin Films
Mühlbacher, M. (Speaker)
24 Apr 2015
Activity: Participating in or organising an event › Participation in conference