Evaluation of TiN diffusion barrier layers with different microstructures by transmission electron microscopy and atom probe tomography

Marlene Mühlbacher, Francisca Mendez Martin, Bernhard Sartory, Livia Chitu, Jun Lu, Nina Schalk, Jozef Keckes, Lars Hultman, Christian Mitterer

Research output: Contribution to conferencePresentationResearchpeer-review

Filter
Participation in conference

Search results