Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target

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Translated title of the contribution	Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target
Original language	English
Pages (from-to)	063304-1-063304-10
Journal	Journal of applied physics
Volume	104
DOIs	https://doi.org/10.1063/1.2978211
Publication status	Published - 2008

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@article{bded4a93c6844f5db9efd98191d05d32,

title = "Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target",

author = "J{\"o}rg Neidhardt and S. Mraz and J.M. Schneider and E. Strub and W. Bohne and B. Liedke and W. M{\"o}ller and Christian Mitterer",

year = "2008",

doi = "10.1063/1.2978211",

language = "English",

volume = "104",

pages = "063304--1--063304--10",

journal = "Journal of applied physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

}

TY - JOUR

T1 - Experiment and simulation of the compositional evolution of Ti-B thin films by sputtering of a compound target

AU - Neidhardt, Jörg

AU - Mraz, S.

AU - Schneider, J.M.

AU - Strub, E.

AU - Bohne, W.

AU - Liedke, B.

AU - Möller, W.

AU - Mitterer, Christian

PY - 2008

Y1 - 2008

U2 - 10.1063/1.2978211

DO - 10.1063/1.2978211

M3 - Article

SN - 0021-8979

VL - 104

SP - 063304-1-063304-10

JO - Journal of applied physics

JF - Journal of applied physics

ER -