Experimental Evaluation of Vibration Influence on a Resonant MEMS Scanning System for Automotive Lidars

Han Woong Yoo, Rene Riegler, David Brunner, Stephan Gerhard Albert, Thomas Thurner, Georg Schitter

Research output: Contribution to journalArticleResearchpeer-review


This article demonstrates a vibration test for a resonant MEMS scanning system in operation to evaluate the vibration immunity for automotive lidar applications. The MEMS mirror has a reinforcement structure on the backside of the mirror, causing vibration coupling by a mismatch between the center of mass and the rotation axis. An analysis of energy variation is proposed, showing the direction dependency of vibration coupling. Vibration influences are evaluated by transient vibration response and vibration frequency sweep using a single tone vibration for translational y- and z- axis. The measurement results demonstrate standard deviation (STD) amplitude and frequency errors are up to 1.64% and 0.26%, respectively, for 2grms single tone vibrations on y axis. The simulation results also show a good agreement with both measurements, proving the proposed vibration coupling mechanism of the MEMS mirror. The phased locked loop (PLL) improves the STD amplitude and frequency errors to 0.91% and 0.15% for y axis vibration, corresponding to 44.4% and 43.0% reduction, respectively, showing the benefit of a controlled MEMS mirror for reliable automotive MEMS lidars.
Original languageEnglish
Pages (from-to)3099-3108
Number of pages10
JournalIEEE transactions on industrial electronics
Issue number3
Publication statusPublished - 17 Mar 2021
Externally publishedYes

Bibliographical note

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  • Automotive applications
  • laser radar
  • microelectromechanical system (MEMS)
  • micromirrors
  • phase locked loops (PLL)
  • robustness
  • system testing

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