FIB damage of Cu and possible consequences for miniaturized mechanical tests

Daniel Kiener, Christian Motz, Martin Rester, Monika Jenko, Gerhard Dehm

Research output: Contribution to journalArticleResearchpeer-review

345 Citations (Scopus)
Translated title of the contributionFIB damage of Cu and possible consequences for miniaturized mechanical tests
Original languageEnglish
Pages (from-to)262-272
JournalMaterials science and engineering: A, Structural materials: properties, microstructure and processing
Volume459
DOIs
Publication statusPublished - 2007

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