Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva; Matheus Tunes; Philip D. Edmondson; Nelson B. Lima; Julio C. Sagás; Luis C. Fontana; Cláudio G. Schön

doi:10.1007/s42452-020-2617-3

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva, Matheus Tunes, Philip D. Edmondson, Nelson B. Lima, Julio C. Sagás, Luis C. Fontana, Cláudio G. Schön

Chair of Nonferrous Metallurgy (520)

Research output: Contribution to journal › Article › Research › peer-review

6 Citations (Scopus)

Original language	English
Article number	864
Number of pages	8
Journal	SN applied sciences
Volume	2020
Issue number	2
DOIs	https://doi.org/10.1007/s42452-020-2617-3
Publication status	E-pub ahead of print - 9 Apr 2020

Access to Document

10.1007/s42452-020-2617-3

Cite this

@article{3069202124c44716add8bf23773a5510,

title = "Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films",

author = "{da Silva}, {Felipe C.} and Matheus Tunes and Edmondson, {Philip D.} and Lima, {Nelson B.} and Sag{\'a}s, {Julio C.} and Fontana, {Luis C.} and Sch{\"o}n, {Cl{\'a}udio G.}",

year = "2020",

month = apr,

day = "9",

doi = "10.1007/s42452-020-2617-3",

language = "English",

volume = "2020",

journal = "SN applied sciences ",

issn = "2523-3971 ",

publisher = "Springer International Publishing",

number = "2",

}

TY - JOUR

T1 - Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

AU - da Silva, Felipe C.

AU - Tunes, Matheus

AU - Edmondson, Philip D.

AU - Lima, Nelson B.

AU - Sagás, Julio C.

AU - Fontana, Luis C.

AU - Schön, Cláudio G.

PY - 2020/4/9

Y1 - 2020/4/9

U2 - 10.1007/s42452-020-2617-3

DO - 10.1007/s42452-020-2617-3

M3 - Article

SN - 2523-3971

VL - 2020

JO - SN applied sciences

JF - SN applied sciences

IS - 2

M1 - 864

ER -