Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva, Matheus Tunes, Philip D. Edmondson, Nelson B. Lima, Julio C. Sagás, Luis C. Fontana, Cláudio G. Schön

Research output: Contribution to journalArticleResearchpeer-review

6 Citations (Scopus)
Original languageEnglish
Article number864
Number of pages8
JournalSN applied sciences
Issue number2
Publication statusE-pub ahead of print - 9 Apr 2020

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