Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva; Matheus Tunes; Philip D. Edmondson; Nelson B. Lima; Julio C. Sagás; Luis C. Fontana; Cláudio G. Schön

doi:10.1007/s42452-020-2617-3

Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

Felipe C. da Silva
, Matheus Tunes
, Philip D. Edmondson
, Nelson B. Lima
, Julio C. Sagás
, Luis C. Fontana
, Cláudio G. Schön

Chair of Nonferrous Metallurgy (520)

Institute of Energy and Nuclear Research (IPEN-CNEN/SP)
Oak Ridge National Laboratory (ORNL)
Universidade do Estado de Santa Catarina
Universidade de São Paulo

Research output: Contribution to journal › Article › Research › peer-review

6 Citations (Scopus)

Original language	English
Article number	864
Number of pages	8
Journal	SN applied sciences
Volume	2020
Issue number	2
DOIs	https://doi.org/10.1007/s42452-020-2617-3
Publication status	E-pub ahead of print - 9 Apr 2020

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10.1007/s42452-020-2617-3

Cite this

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title = "Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films",

author = "\{da Silva\}, \{Felipe C.\} and Matheus Tunes and Edmondson, \{Philip D.\} and Lima, \{Nelson B.\} and Sag{\'a}s, \{Julio C.\} and Fontana, \{Luis C.\} and Sch{\"o}n, \{Cl{\'a}udio G.\}",

year = "2020",

month = apr,

day = "9",

doi = "10.1007/s42452-020-2617-3",

language = "English",

volume = "2020",

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publisher = "Springer International Publishing",

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T1 - Grid-assisted magnetron sputtering deposition of nitrogen graded TiN thin films

AU - da Silva, Felipe C.

AU - Tunes, Matheus

AU - Edmondson, Philip D.

AU - Lima, Nelson B.

AU - Sagás, Julio C.

AU - Fontana, Luis C.

AU - Schön, Cláudio G.

PY - 2020/4/9

Y1 - 2020/4/9

U2 - 10.1007/s42452-020-2617-3

DO - 10.1007/s42452-020-2617-3

M3 - Article

SN - 2523-3971

VL - 2020

JO - SN applied sciences

JF - SN applied sciences

IS - 2

M1 - 864

ER -