High-temperature oxidation resistance of Ta-Si-N films with a high Si content

P. Zeman, J. Musil, R. Daniel

Research output: Contribution to journal › Article › Research › peer-review

44 Citations (Scopus)

Original language	English
Journal	Surface & coatings technology
DOIs	https://doi.org/10.1016/j.surfcoat.2005.02.097
Publication status	Published - 2006

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title = "High-temperature oxidation resistance of Ta-Si-N films with a high Si content",

author = "P. Zeman and J. Musil and R. Daniel",

year = "2006",

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language = "English",

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AU - Zeman, P.

AU - Musil, J.

AU - Daniel, R.

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