Hillock Formation and Thermal Stresses in Thin Au Films on Si Substrates

M. Sauter, Thomas John Balk, Gerhard Dehm, J.A. Nucci, E. Arzt

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)
Translated title of the contributionHillock Formation and Thermal Stresses in Thin Au Films on Si Substrates
Original languageEnglish
Title of host publicationMater. Res. Soc. Symp. Proc.
Publication statusPublished - 2005

Cite this