| Translated title of the contribution | Homogeneity of industrial scale thermal CVD processes for TiCN hard coatings |
|---|---|
| Original language | English |
| Title of host publication | proc. 17th International Plansee Seminar |
| Pages | 1-8 |
| Publication status | Published - 2009 |
Homogeneity of industrial scale thermal CVD processes for TiCN hard coatings
Christoph Czettl, Christian Mitterer, C Michotte, M Penoy, Martin Kathrein
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution