Homogeneity of industrial scale thermal CVD processes for TiCN hard coatings

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Translated title of the contributionHomogeneity of industrial scale thermal CVD processes for TiCN hard coatings
Original languageEnglish
Title of host publicationproc. 17th International Plansee Seminar
Pages1-8
Publication statusPublished - 2009

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