Translated title of the contribution | Hydrogen content in amorphous SiN |
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Original language | English |
Pages (from-to) | 49-52 |
Journal | European semiconductor |
Volume | 22 |
Publication status | Published - 2000 |
Hydrogen content in amorphous SiN
I Jonak, Friedemar Kuchar
Research output: Contribution to journal › Article › Research › peer-review