Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Gregor Hlawacek; Vasilisa Veligura; Stefan Lorbek; Tijs F. Mocking; Antony George; Raoul van Gastel; Harold J. W. Zandvliet; Bene Poelsema

doi:10.3762%2Fbjnano.3.58

Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

Gregor Hlawacek
, Vasilisa Veligura
, Stefan Lorbek
, Tijs F. Mocking
, Antony George
, Raoul van Gastel
, Harold J. W. Zandvliet
, Bene Poelsema

Chair of Physics (460)

Research output: Contribution to journal › Article › Research › peer-review

31 Citations (Scopus)

Translated title of the contribution	Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism
Original language	English
Pages (from-to)	507-512
Journal	Beilstein journal of nanotechnology
Volume	3
DOIs	https://doi.org/10.3762%2Fbjnano.3.58
Publication status	Published - 2012

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10.3762%2Fbjnano.3.58

Cite this

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title = "Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism",

author = "Gregor Hlawacek and Vasilisa Veligura and Stefan Lorbek and Mocking, \{Tijs F.\} and Antony George and \{van Gastel\}, Raoul and Zandvliet, \{Harold J. W.\} and Bene Poelsema",

year = "2012",

doi = "10.3762\%2Fbjnano.3.58",

language = "English",

volume = "3",

pages = "507--512",

journal = "Beilstein journal of nanotechnology ",

issn = "2190-4286",

publisher = "Beilstein-Institut Zur Forderung der Chemischen Wissenschaften",

}

TY - JOUR

T1 - Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism

AU - Hlawacek, Gregor

AU - Veligura, Vasilisa

AU - Lorbek, Stefan

AU - Mocking, Tijs F.

AU - George, Antony

AU - van Gastel, Raoul

AU - Zandvliet, Harold J. W.

AU - Poelsema, Bene

PY - 2012

Y1 - 2012

U2 - 10.3762%2Fbjnano.3.58

DO - 10.3762%2Fbjnano.3.58

M3 - Article

SN - 2190-4286

VL - 3

SP - 507

EP - 512

JO - Beilstein journal of nanotechnology

JF - Beilstein journal of nanotechnology

ER -