In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Angelika Zeilinger; Juraj Todt; C. Krywka; Martin Müller; Werner Ecker; Bernhard  Sartory; Michael Meindlhumer; Mario Stefenelli; Rostislav Daniel; Christian Mitterer; Jozef Keckes

doi:DOI: 10.1038/srep22670

In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Angelika Zeilinger, Juraj Todt, C. Krywka, Martin Müller, Werner Ecker, Bernhard Sartory, Michael Meindlhumer, Mario Stefenelli, Rostislav Daniel, Christian Mitterer, Jozef Keckes

Research output: Contribution to journal › Article › Research › peer-review

35 Citations (Scopus)

Original language	English
Pages (from-to)	1-14
Number of pages	14
Journal	Scientific reports (London : Nature Publishing Group)
Volume	6:22670
DOIs	https://doi.org/DOI: 10.1038/srep22670
Publication status	Published - 7 Mar 2016

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DOI: 10.1038/srep22670

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Zeilinger, A., Todt, J., Krywka, C., Müller, M., Ecker, W., Sartory, B., Meindlhumer, M., Stefenelli, M., Daniel, R., Mitterer, C., & Keckes, J. (2016). In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation. Scientific reports (London : Nature Publishing Group), 6:22670, 1-14. https://doi.org/DOI: 10.1038/srep22670

@article{e9b014735d0e46e4a035e820e55a28b8,

title = "In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation",

author = "Angelika Zeilinger and Juraj Todt and C. Krywka and Martin M{\"u}ller and Werner Ecker and Bernhard Sartory and Michael Meindlhumer and Mario Stefenelli and Rostislav Daniel and Christian Mitterer and Jozef Keckes",

year = "2016",

month = mar,

day = "7",

doi = "DOI: 10.1038/srep22670",

language = "English",

volume = "6:22670",

pages = "1--14",

journal = "Scientific reports (London : Nature Publishing Group)",

issn = "2045-2322",

publisher = "Nature Publishing Group",

}

Zeilinger, A, Todt, J, Krywka, C, Müller, M, Ecker, W, Sartory, B, Meindlhumer, M, Stefenelli, M, Daniel, R , Mitterer, C & Keckes, J 2016, 'In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation', Scientific reports (London : Nature Publishing Group), vol. 6:22670, pp. 1-14. https://doi.org/DOI: 10.1038/srep22670

TY - JOUR

T1 - In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

AU - Zeilinger, Angelika

AU - Todt, Juraj

AU - Krywka, C.

AU - Müller, Martin

AU - Ecker, Werner

AU - Sartory, Bernhard

AU - Meindlhumer, Michael

AU - Stefenelli, Mario

AU - Daniel, Rostislav

AU - Mitterer, Christian

AU - Keckes, Jozef

PY - 2016/3/7

Y1 - 2016/3/7

U2 - DOI: 10.1038/srep22670

DO - DOI: 10.1038/srep22670

M3 - Article

SN - 2045-2322

VL - 6:22670

SP - 1

EP - 14

JO - Scientific reports (London : Nature Publishing Group)

JF - Scientific reports (London : Nature Publishing Group)

ER -