In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Angelika Zeilinger; Juraj Todt; C. Krywka; Martin Müller; Werner Ecker; Bernhard  Sartory; Michael Meindlhumer; Mario Stefenelli; Rostislav Daniel; Christian Mitterer; Jozef Keckes

doi:DOI: 10.1038/srep22670

In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

Angelika Zeilinger
, Juraj Todt
, C. Krywka
, Martin Müller
, Werner Ecker
, Bernhard Sartory
, Michael Meindlhumer
, Mario Stefenelli
, Rostislav Daniel
, Christian Mitterer
, Jozef Keckes

University of Kiel and Helmholtz Zentrum Geesthacht
Materials Center Leoben Forschungs GmbH

Research output: Contribution to journal › Article › Research › peer-review

35 Citations (Scopus)

Original language	English
Pages (from-to)	1-14
Number of pages	14
Journal	Scientific reports (London : Nature Publishing Group)
Volume	6:22670
DOIs	https://doi.org/DOI: 10.1038/srep22670
Publication status	Published - 7 Mar 2016

Access to Document

DOI: 10.1038/srep22670

Cite this

Zeilinger, A., Todt, J., Krywka, C., Müller, M., Ecker, W., Sartory, B., Meindlhumer, M., Stefenelli, M., Daniel, R., Mitterer, C., & Keckes, J. (2016). In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation. Scientific reports (London : Nature Publishing Group), 6:22670, 1-14. https://doi.org/DOI: 10.1038/srep22670

@article{e9b014735d0e46e4a035e820e55a28b8,

title = "In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation",

author = "Angelika Zeilinger and Juraj Todt and C. Krywka and Martin M{\"u}ller and Werner Ecker and Bernhard Sartory and Michael Meindlhumer and Mario Stefenelli and Rostislav Daniel and Christian Mitterer and Jozef Keckes",

year = "2016",

month = mar,

day = "7",

doi = "DOI: 10.1038/srep22670",

language = "English",

volume = "6:22670",

pages = "1--14",

journal = "Scientific reports (London : Nature Publishing Group)",

issn = "2045-2322",

publisher = "Nature Research, Gro{\ss}britannien",

}

Zeilinger, A, Todt, J, Krywka, C, Müller, M, Ecker, W, Sartory, B, Meindlhumer, M, Stefenelli, M, Daniel, R , Mitterer, C & Keckes, J 2016, 'In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation', Scientific reports (London : Nature Publishing Group), vol. 6:22670, pp. 1-14. https://doi.org/DOI: 10.1038/srep22670

TY - JOUR

T1 - In-situ Observation of Cross- Sectional Microstructural Changes and Stress Distributions in Fracturing TiN Thin Film during Nanoindentation

AU - Zeilinger, Angelika

AU - Todt, Juraj

AU - Krywka, C.

AU - Müller, Martin

AU - Ecker, Werner

AU - Sartory, Bernhard

AU - Meindlhumer, Michael

AU - Stefenelli, Mario

AU - Daniel, Rostislav

AU - Mitterer, Christian

AU - Keckes, Jozef

PY - 2016/3/7

Y1 - 2016/3/7

U2 - DOI: 10.1038/srep22670

DO - DOI: 10.1038/srep22670

M3 - Article

SN - 2045-2322

VL - 6:22670

SP - 1

EP - 14

JO - Scientific reports (London : Nature Publishing Group)

JF - Scientific reports (London : Nature Publishing Group)

ER -