Industrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets

Thomas Weirather, Christoph Czettl, P. Polcik, M. Kathrein, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

22 Citations (Scopus)
Translated title of the contributionIndustrial-scale sputter deposition of Cr1-xAlxN coatings with 0.21<x <0.74 from segmented targets
Original languageEnglish
Pages (from-to)303-310
JournalSurface & coatings technology
Volume232
DOIs
Publication statusPublished - 2013

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