Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

Thomas Weirather, Stephan Grasser, Christoph Czettl, P. Polcik, M. Kathrein, Christian Mitterer

Research output: Contribution to conference › Poster › Research › peer-review

Translated title of the contribution	Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets
Original language	English
Publication status	Published - 2013
Event	18th Plansee Seminar - Reutte, Austria Duration: 3 Jun 2013 → 7 Jun 2013

Cite this

@conference{7283a6e152d3478ca4ccdc3cdc119b0a,

title = "Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets",

author = "Thomas Weirather and Stephan Grasser and Christoph Czettl and P. Polcik and M. Kathrein and Christian Mitterer",

year = "2013",

language = "English",

note = "18th Plansee Seminar ; Conference date: 03-06-2013 Through 07-06-2013",

}

TY - CONF

T1 - Industrial-scale sputter deposition of Cr1-xAlxN coatings with various compositions from segmented powder-metallurgical targets

AU - Weirather, Thomas

AU - Grasser, Stephan

AU - Czettl, Christoph

AU - Polcik, P.

AU - Kathrein, M.

AU - Mitterer, Christian

PY - 2013

Y1 - 2013

M3 - Poster

T2 - 18th Plansee Seminar

Y2 - 3 June 2013 through 7 June 2013

ER -