Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni, Christian Mitterer

Research output: Contribution to journalArticleResearchpeer-review

11 Citations (Scopus)
Original languageEnglish
Article number021504
Number of pages8
JournalJournal of vacuum science & technology / A (JVST)
Issue number2
Publication statusPublished - 4 Jan 2017

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