Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer; Aitana Tarazaga Martin-Luengo; Robert Franz; Enrico Franzke; Harald Köstenbauer; Jörg Winkler; Alberta Bonanni; Christian Mitterer

doi:10.1116/1.4973214

Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties

Julia Pachlhofer, Aitana Tarazaga Martin-Luengo, Robert Franz, Enrico Franzke, Harald Köstenbauer, Jörg Winkler, Alberta Bonanni, Christian Mitterer

Research output: Contribution to journal › Article › Research › peer-review

11 Citations (Scopus)

Original language	English
Article number	021504
Number of pages	8
Journal	Journal of vacuum science & technology / A (JVST)
Volume	35.2017
Issue number	2
DOIs	https://doi.org/10.1116/1.4973214
Publication status	Published - 4 Jan 2017

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10.1116/1.4973214

Cite this

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title = "Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties",

author = "Julia Pachlhofer and Martin-Luengo, {Aitana Tarazaga} and Robert Franz and Enrico Franzke and Harald K{\"o}stenbauer and J{\"o}rg Winkler and Alberta Bonanni and Christian Mitterer",

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AU - Pachlhofer, Julia

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AU - Franz, Robert

AU - Franzke, Enrico

AU - Köstenbauer, Harald

AU - Winkler, Jörg

AU - Bonanni, Alberta

AU - Mitterer, Christian

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DO - 10.1116/1.4973214

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VL - 35.2017

JO - Journal of vacuum science & technology / A (JVST)

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